surface micromachining

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• Surface micromachining — is a process used to produce micromachinery or MEMS.Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining is based on the deposition and etching of different structural… …   Wikipedia

• Micromachining — may refer to: Superfinishing, a metalworking process for producing very fine surface finishes Various microelectromechanical systems Bulk micromachining Surface micromachining High aspect ratio microstructure technologies See also High aspect… …   Wikipedia

• Bulk micromachining — is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively… …   Wikipedia

• Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

• Microfluidics — deals with the behavior, precise control and manipulation of fluids that are geometrically constrained to a small, typically sub millimeter, scale. Typically, micro means one of the following features: small volumes (nl, pl, fl) small size low… …   Wikipedia

• Microtechnology — is technology with features near one micrometre (one millionth of a metre, or 10−6 metre, or 1μm). In the 1960s, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be… …   Wikipedia

• Micromachinery — micromachines redirects here. For the toys, see Micro Machines. For the video games based on the toys, see Micro Machines (video games). A micromachine by Sandia is moved by a lit LED at Miraikan in Tokyo …   Wikipedia

• 3D microfabrication — relates to the engineering of bulk solids on the micrometre or submicrometre scale. Although the term nanofabrication might be considered for the submicrometre scale, it is not in common use, and tends to relate to a bottom up approach (while… …   Wikipedia

• Nanofluidic circuitry — is a nanotechnology aiming for control of fluids in nanometer scale. Due to the effect of an electrical double layer within the fluid channel, the behavior of nanofluid is observed to be significantly different compared with its microfluidic… …   Wikipedia

• Millipede memory — Computer memory types Volatile RAM DRAM (e.g., DDR SDRAM) SRAM In development T RAM Z RAM TTRAM Historical Delay line memory Selectron tube Williams tube Non volatile …   Wikipedia

• Comb drive — Comb drives capacitive actuators, often used linear actuators that utilize electrostatic forces that act between two electrically conductive combs. Comb drive actuators typically operate at the micro or nanometer scale and are generally… …   Wikipedia